SAES Pure Gas
SAES Pure Gas is the world leader in gas purification technology, developing ultra-high pure gas-handling equipment, and supplying gas purifiers for a wide range of bulk and specialty gas applications. Its innovative gas purification solutions are applied in different industrial segments such as: Microelectronics, Compound Semiconductor, Display Industry (LCD, OLED), Fiber optics, LED, Solar and Photovoltaics.
Products platforms include the MonoTorr® gas purifier, ambient temperature MicroTorr® purifier and the MegaTorr® bulk gas purifiers as well as manufacturing replacement parts for Johnson Matthey HP series, V-purge, HTG, GPT and PSH Series palladium membrane hydrogen purifiers. SAES Pure Gas also acquired the intellectual property and all other rights to manufacture and market Power + Energy’s low cost, high efficiency, Palladium micro-channel purifiers.
SAES Pure Gas is the largest global supplier of bulk and point-of-use gas purifiers for a wide range of gases. SAES Pure Gas manufactures gas purification systems for use at leading worldwide semiconductor fabs. These purifiers provide parts-per-trillion gas purity for use in manufacturing of semiconductors, display, LED, and solar products.
Gas purifiers for point-of-use and bulk applications are available for most inert and specialty gases including Nitrogen, Hydrogen, Ammonia, CDA (Clean Dry Air), Helium, Argon, Oxygen, Carbon Dioxide, and other gases.
Bulk Gas Purifiers
- Bulk gas purifiers include the MegaTorr® product line which is available for flows from 166 slpm (10 Nm3/hr) to over 333,333 slpm (20,000 Nm3/hr)
- Point-of-use purifiers include MonoTorr® heated getter purifiers for point-of-use applications to purify nitrogen, argon, helium, and other rare gases
- MicroTorr ambient temperature purifiers are intended for inert gases, specialty gases, and CDA (Clean Dry Air) at any flow rate
MonoTorr® is a registered trademark of SAES Pure Gas, Inc.
MicroTorr® is a registered trademark of SAES Pure Gas, Inc.
MegaTorr® is a registered trademark of SAES Pure Gas, Inc.